Patents
|
Patent Filing #
|
Title of published patents licensed to Sinmat |
| 6,821,309 |
Chemical-Mechanical Polishing Slurry For Polishing of Copper or Silver Films |
| 6,866,793 |
High selectivity and high planarity Dielectric polishing |
| 7,148,189 |
Chemical-mechanical polishing slurry for polishing metal films |
| 10/255,493 |
Novel Method For Formation Of Conductor/Insulator Based Multi-Level Structures |
| 10/263,063 |
Novel Slurry For Polishing Of Silica For Shallow Trench Isolation Structures |
| 10/082,010 |
Slurry and Method For Chemical Mechanical Polish of Metal Structures including Refractory Metal Based Barrier Layers |
| 20030162399 |
Method, composition and apparatus for tunable selectivity during CMP |
| 20030168627 |
Slurry and method for CMP of metal structures including refractory barrier layers |
|
|
|
|
